RESEARCH FOR BUILDING A PRESSURE MEASUREMENT SYSTEM USING MEMS SENSOR
This paper presents research and design of pressure measurement system. The measuring system includes a MEMS pressure sensor (made at the ITIMS Institute), an A/D module and a Raspberry Pi embedded computer board with touch screen display. The system is studied using pressure sensors made in Vietnam and embedded computers, the measurement results show that the microsensor operates linearly in the pressure range from 0 ÷ 300 mmHg, the sensitivity reaches 0.055 mV/mmHg. This opens up the application possibilities of sensors in the field of industry and medicine, etc.
Vu N. Hung, Le V. Minh, Nguyen V. Minh, Chu M. Hoang, Trinh Q. Thong, R. Amarasinge, Dao V. Dung, S. Sugiyama, Design and Fabrication of Miniature Piezoresistive Pressure Sensors Employing Silicon-on-Insulator Substrate. In Proceedings of First International Workshop on Nanotechnology and Application (IWNA 2007), 15-17 November 2007, Vung Tau City, Vietnam.
Maik Schmidt, Raspberry Pi, A Quick-Start Guide..