Pham Thi Tuoi, Pham Xuan Hien, Nguyen Thi Van Anh, Nguyen Thi Thuy Duong, Nguyen Quang Van. SIMULATIONS OF ARGON GASEOUS ELECTRONICS CONFERENCE INDUCTIVELY COUPLED PLASMA REACTOR USING COMSOL MULTIPHYSICS. jst [Internet]. 2019Jan.6 [cited 2024Dec.22];20:28-0. Available from: http://tapchi.utehy.edu.vn/index.php/jst/article/view/57