SIMULATIONS OF ARGON GASEOUS ELECTRONICS CONFERENCE INDUCTIVELY COUPLED PLASMA REACTOR USING COMSOL MULTIPHYSICS
In this study, a model of reactor inductively coupled plasma using Argon (Ar) has been studied using Comsol Multiphysics’s built-in Plasma Module
Yamabe, Buckman, and Phelps, Measurement of free-free emission from low-energy-electron collisions with Ar. Phys. Rev, 27, 1983, pp.1345.
PHELPS database, http://www.lxcat.laplace.univ-tlse.fr, retrieved June 4, 2013.